Silicon on sapphire large scale integration 蓝宝石上硅大规模集成电路
Silicon on sapphire technology 蓝宝石上外延硅技术
The results showed that the electron binding energy of silicon and oxygen elements was same as those of in compound SiO_2. SiO_2 films can be obtained on sapphire by RF magnetron reactive sputtering method. 结果表明,制备的薄膜中Si和O形成SiO2化学键,计算出的O与Si的原子比接近2:1,采用射频磁控反应溅射法在白宝石上能够沉积出SiO2薄膜。
Design of adjusting resistance on silicon on sapphire pressure sensor chip 硅-蓝宝石压力传感器芯片调整电阻的设计
Assessment of epitaxial silicon film on sapphire ( or spinel) by reflection spectrum 用反射光谱鉴定蓝宝石(或尖晶石)衬底上外延硅膜
Grown& Film Silicon Transistors on Sapphire 蓝宝石上生长的薄膜硅晶体管
ESR of Silicon Film on Sapphire Detected by Injected Current and the Defects on the Si/ Al_2O_3 Interface 蓝宝石上硅膜(SOS)肖特基结注入电流检测的电子自旋共振及Si/Al2O3界面缺陷
The Principle and Technology for Silicon on Sapphire Integrated Pressure Transducer 硅-兰宝石集成压力传感器原理及制作工艺